Conference Proceedings

Abstract

An alternative approach for data analysis of optical emission spectroscopy was developed to overcome the dilemma of the low emission intensities and high sensitivity of the reconstruction on small errors of the line intensities. This work comprises of data analysis of an experimental dc reactive magnetron sputtering of titanium dioxide. The purposed method was based on several works and aimed to provide accuracy improvement of the method commonly employed in commercial systems. The wavelength calibration can be carried with the ease and without having to write calibration coefficients on the EEPROM. More accurate peak finding was obtained by coupling spectroscopic raw data processing with a Lorentzian line broadening and recognizing technique. The results are displayed with the advantages of the purposed method.