Conference Proceedings

International Conference on Advances In Engineering And Technology - ICAET 2014

Modeling and structure parameters design of the silicon resonant Pressure sensor

Author(s) : MOHAMED .M. SHAGLOUF

Abstract

Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring pressure is established. The relationship between the basic natural frequency of the beam resonator and the pressure is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a set of optimum parameters of the proposed sensing unit is determined.

Conference Title : International Conference on Advances In Engineering And Technology - ICAET 2014
Conference Date(s) : 24 - 25 May, 2014
Place : RIT, Roorkee, India
No fo Author(s) : 1
DOI : 10.15224/978-1-63248-028-6-02-24
Page(s) : 113 -117
Electronic ISBN : 978-1-63248-028-6
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