Conference Proceedings

Abstract

Inclinometers are used in various industries such as aviation and consumer electronics. They are also used in the civil engineering field to measure the horizontality and verticality of structures. An improvement in micro-electromechanical systems (MEMS) techniques in recent times has led to the development of a MEMS inclinometer. Interest in the MEMS inclinometer is increasing because of the many merits of the MEMS technique. In this paper, we report on an inclinometer that employs MEMS techniques for measuring structures and we investigate its usability on sites through experimentation. The test results prove the accuracy of the measurements obtained, and indicate that the proposed inclinometer can be beneficially applied as a measurement tool in the civil engineering field.